SHR 3000 series is the 3 - axis cylinder type coordinate robot designed to be used in super clean room, it can be use for IC wafer handling in the semiconductor equipment, testing instruments and others.
Features
- Applicable to 0.1um, class 1, super clean room
- Speedy & smooth motion
- Easy control.
- Easy maintenance
- Versatile
Main Products
ex series actuator & controller, ia - 12e/f type servo cylinoer sa series servo actuator, table top type actuator