Display： 4 digits, 10 mm LCD, with blue backlight
Parameters: Ra, Rz, Rq, Rt
Measuring Range
Ra, Rq: 0.005-16.00um/0.020-629.9uinch
Rz,Rt: 0.020-160.0um/0.078-6299uinch
Accuracy: ≤±10%
Fluctuation of display value: Not more than 6%
Sensor :
Test Principle: Inductance type
Radius of Probe Pin: 5um
Material of Probe Pin: Diamond
Dynamo-measurement of Probe: 4mN(0.4gf)
Probe Angle: 90°
Vertical Radius of Guiding Head: 48mm
Maximum driving stroke: 17.5mm/0.7inch
Cutoff length (l): 0.25mm / 0.8mm / 2.5mm optional
Evaluation length: 5l
Driving speed:
sampling length = 0.25mm Vt=0.135mm/s
sampling length = 0.8mm Vt=0.5mm/s
sampling length = 2.5mm Vt=1mm/s
returning Vt=1mm/s
Profile digital filter
Filtered Profile: RC
Filtered Profile: PC-RC
Filtered Profile: Gauss
Non-Filtered Profile: D-P
Resolution : .001μm if reading ＜10μm
0.01μm if 10μm≤reading＜100μm
0.1μm if reading ≥100μm
Evaluation length : 5 cut-off
Power Li-ion battery: rechargeable
Operating conditions: Temp. 0~50℃
Humidity