Applications:
Industrial harmfulness gas treatment
Semiconductor process harmfulness gas treatment
Engine and Boiler exhaust gas treatment
Material plasma surface treatment
Semicondoctor bonding process
NOx/SOx treatment
Film treatment
G7, G8 LCD surface treatment
Industrial harmfulness gas treatment
Semiconductor process harmfulness gas treatment
Engine and Boiler exhaust gas treatment
Material plasma surface treatment
Semicondoctor bonding process
NOx/SOx treatment
Film treatment
G7, G8 LCD surface treatment
Specifications
- Plasma Power Device
- Input Volt: Single phase or 3phase 220V 60Hz
- Output: 2/4/6/8/12kW, +/-15kVpeak
- Frequency: 5~30kHz
- Plasma Torch Power
- Output: 0~2,000Vdc, 0~25KAdc, 25MW
- Controller: Full Digital 32bit DSP
- Data Collect : 8Ch/20Min
Features
- Plasma Power Device
- LCD/PDP Plasma Clean
- Gas ballast plasma clean
- Coating Increase
- Plasma Torch Power
- High temp plasma(torch) power
- Super conductivity magnet coil power
- MRI NMR medical device
- Laser power
Main Products
Clean ESD Polyimide, AP Plasma Power Supply, Induction Oven