First Sensor features a highly innovative technology platform for manufacturing high-precision inertial sensors for geoengineering, condition monitoring or navigation applications. The MEMS sensors allow for flexible customization to fit your individual application requirements.

Inclinometers and accelerometers

The capacitive inclinometers and accelerometers are based on single crystal silicon sensor elements and utilize state-of-the-art micromachining technology to achieve large signal-to-noise ratios and excellent stability over temperature. Therefore, they are able to detect extremely small changes in inclination or acceleration.

Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.