XP-611Nanopositioning Stages
Key Specifications/Special Features:
Characteristics:
• 110um travel range
• Very compact
• Open and closed-loop versions
• Built-in high-performance piezo ceramic
• Fast scanning and settling
Applications:
• Scanning systems
• Mechanical engineering, micromachining
• Fiber positioning,laser optics
• Macromanipulation,fiber-alignment
• Optics, photoelectron
Technical Data:
• Types: XP-611.XYZ100S,XP-611.XYZ100K
• Active axes: X,Y,Z
• Travel range(0~150V): 110/axis um±20%
• Integrated sensor: SGS
• Open/closed-loop resolution(16bit): 4/7nm
• Open/closed-loop resolution(24bit): 0.2/2nm
• Linearity, closed-loop: 0.2%F.S.
• Repeatability: 0.05 %F.S.
• Stiffness in motion direction: 0.7N/um
• Max. load: 600g
• Electrical capacitance: 1.8/axis uF±20%
• Unloaded response frequency: 250/200/160Hz±20%
• Operating temperature range: -20~80℃
• Voltage/sensor connection: LEMO
• Mass: 160g±5%
• Material: S/Al 
Dimensions: 35×35×47mm