Accuracy of X-Y axis (μm): 3+L/150
Accuracy of Z axis (μm): 5+L/100
Repeatability（mm）0.005
Moving speed (mm/s): X-Y: 0~150    Z: 0~100
Linear encoder: exposed glass linear encoder with resolution of 1.0μm
Camera type: SBK-HC536 700 lines industrial color camera
Frame grabber: color frame grabber with high resolution
Guideway: Z axis：“HIWIN” P level linear guideway  X-Y axis：precision cross roller guideway
Ball screw: Z axis：“TBI” ground ball screw     X-Y axis：linear drive nut
Optics: 6:5:1 continual zoom detent body tube
Magnification: optics zoom ratio: 0.7-4.5X; image zoom ratio: 24-158X
Software: SBK-JCNC full-automatic measuring software
Profile illumination: LED cold lighting with 256 level programmable brightness adjustment
Surface illumination: 4 rings 8 segments LED cold lighting with segmented independent control & 256 level programmable brightness adjustment
Control system: SBK3400 fully closed-loop control
Motor: “TIGER” synchronous AC servo motor
Operated m