picture of centralized fluid supply system
KZ-Centralized Fluid Supply System
Type: KZ-LS-CFS
For centralized and continuous supplement of chemicals
Advantages：
Unique space layout, easily managed, operated and maintained.
Automatic control module based on PLC.
Safe, stable
Based on PLC / man-machine automatic control module Dynamic management model of remote monitoring High-purity quality, away from pollution
Technical Parameters
Supply substances HF 2 barrels (200L/barrel)
HNO3 2 barrels (200L/barrel)
HCL 1 barrels (200L/barrel)
NaOH 1 barrels (200L/barrel)
Supply capacity Air pressure 6±0.5kgf/cm2
Control pressure 4-6kgf/cm2
Pump pressure 3-6kgf/cm2(depending on actual load)
work pattern supply for four Kzone horizontal machine
Overall air consumption 300L/min(in steady state)
Single-user fluid supply
Type: KZ-LS-CFS
For centralized and continuous supplement of chemicals
Advantages：
Unique space layout, easily managed, operated and maintained.
Automatic control module based on PLC.
Safe, stable
Based on PLC / man-machine automatic control module Dynamic management model of remote monitoring High-purity quality, away from pollution
Technical Parameters
Supply substances HF 2 barrels (200L/barrel)
HNO3 2 barrels (200L/barrel)
HCL 1 barrels (200L/barrel)
NaOH 1 barrels (200L/barrel)
Supply capacity Air pressure 6±0.5kgf/cm2
Control pressure 4-6kgf/cm2
Pump pressure 3-6kgf/cm2(depending on actual load)
work pattern supply for four Kzone horizontal machine
Overall air consumption 300L/min(in steady state)
Single-user fluid supply
Certificate
- ISO9001
Main Products
Polysilicon Wafer Texture & Washing Machine Silicon Wafer Wet Etching